Item 5.02. Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

On August 11, 2009, Mattson Technology, Inc. (the "Company") announced that effective August 10, 2009 Nigel Wenden resigned from the position of Senior Vice-President, Global Business Operations of the Company.

In connection with the resignation of Nigel Wenden from the position of Senior Vice-President, Global Business Operations of the Company effective August 10, 2009, the Company has entered into a separation agreement with Mr. Wenden (the "Agreement") dated August 10, 2009.

Per the separation agreement, Mattson will pay Mr. Wenden a gross amount of six
(6) months' salary ($145,000) on August 10, 2009, his last day of employment, and a gross amount of three (3) months' salary ($72,500) upon execution of the agreement. The agreement contains a standard release of any and all claims against the Company by Mr. Wenden.

The Agreement between Mr. Wenden and the Company is attached as Exhibit 10.1, and is incorporated by reference under this Item 5.02.

Item 9.01. Financial Statements and Exhibits

(d) Exhibits.

Exhibit Description
10.1 Separation Agreement between Mattson Technology, Inc. and Nigel Wenden, dated August 10, 2009.

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