Item 8.01 Other Events.

On December 31, 2008, the Board of Directors of Amtech Systems, Inc. (the "Company") approved a stock repurchase program, pursuant to which the Company may purchase up to $4,000,000 of its common stock over a one-year period commencing on January 2, 2009.

On January 5, 2009, the Company issued a press release announcing its stock repurchase program. A copy of the press release is furnished as Exhibit 99.1 to this Report.

Item 9.01 Financial Statements and Exhibits.

Exhibit No. Description
99.1 Press Release dated January 5, 2009, announcing stock repurchase program.